E1 Wafer Vacuum Annealing Oven
Custom-made E1 Wafer Vacuum Annealing Oven is used for annealing flat samples in either vacuum or in low pressure inert gas atmosphere. The oven is equipped with oil-free scroll vacuum pump, Convectron vacuum gauge and a digital readout, and manual inert gas flow regulation system. Temperature program is user-defined and PC-controlled.
Sample size: up to 5.5" (diameter).
Vacuum: better than 1 mTorr
Temperature range in vacuum: from room temperature to 420 °C
Temperature range in inert gas atmosphere: from room temperature to 250 °C
Inert gas: nitrogen (typical)
Heater power: 100 W