Rudolph AutoElII-VIS-3 ellipsometer
Rudolph AutoElII-VIS-3 is an automatic-nulling three wavelengths ellipsometer which measures changes in the state of polarization of a light beam reflected from sample surfaces. Two ellipsometric parameters - angles Delta and Psi - can be used to calculate the optical constants of bare surfaces, and the thickness and refractive index of thin films on those surfaces.
Wavelengths: 405 nm (blue), 546.1 nm (green), 632.8 nm (red)
Resolution and accuracy: 0.1° (Delta), 0.05° (Psi), 0.3-1 nm (thickness) & 0.01 (refractive index) for typical silicon oxide on silicon samples.
Angle of incidence: 70° (standard pin located), 60°, 80°, and 90° (additional pin located)
Max sample size: 6" x 6" (15 cm x 15 cm)
Sample plane: horizontal
Sample stage adjustments: height, tilt
Typical time for 1 measurement at one wavelength: 40 s
Spot size on sample: 1.6 mm x 4.7 mm (for 70°)